LASER REPAIRING APPARATUS

PROBLEM TO BE SOLVED: To provide a laser repairing apparatus capable of performing laser repairing processing with high precision and at high speed. SOLUTION: A CCD camera 11 creates image information by picking up the image of a glass substrate 2 which is an object to be inspected. An image process...

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Bibliographische Detailangaben
1. Verfasser:	HORIUCHI KAZUHITO
Format:	Patent
Sprache:	eng
Schlagworte:	CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PERFORMING OPERATIONS PHYSICS SOLDERING OR UNSOLDERING TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a laser repairing apparatus capable of performing laser repairing processing with high precision and at high speed. SOLUTION: A CCD camera 11 creates image information by picking up the image of a glass substrate 2 which is an object to be inspected. An image processing section 12 creates defect feature information showing the feature of the feature of a defect from the image information and decides an irradiation condition when emitting a laser beam according to the defect feature information. A repairing light source 14 sets power or the like of the laser beam on the basis of the information of the irradiation condition, which is output from the image processing section 12 and emits the laser beam r for repairing the defective part of the glass substrate 2. A DMD unit 16 shapes this laser beam. COPYRIGHT: (C)2011,JPO&INPIT