SUBSTRATE SUCTION UNIT AND SUBSTRATE SUCTION ASSEMBLY

PROBLEM TO BE SOLVED: To provide a substrate suction unit and a substrate suction assembly for sucking a plurality of substrates. SOLUTION: In the substrate suction unit and the substrate suction assembly for sucking a plurality of substrates, the substrate suction assembly includes a fixed frame an...

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Hauptverfasser: TSENG SHIH MING, SUN LIHSHIUAN, CHEN JUIHSI
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creator TSENG SHIH MING
SUN LIHSHIUAN
CHEN JUIHSI
description PROBLEM TO BE SOLVED: To provide a substrate suction unit and a substrate suction assembly for sucking a plurality of substrates. SOLUTION: In the substrate suction unit and the substrate suction assembly for sucking a plurality of substrates, the substrate suction assembly includes a fixed frame and a plurality of substrate suction units. Each substrate suction unit is fixed on the fixed frame corresponding to each substrate with a spacing therebetween. Each substrate suction unit is pneumatically connected to a vacuum apparatus, and includes a body and suction units. The body is pneumatically connected to the vacuum apparatus, the suction units are symmetrically provided on terminals of the body, and pneumatically connected to the vacuum apparatus via the body, and has a plurality of suction members to be used for uniformly sucking any one of the substrates. COPYRIGHT: (C)2011,JPO&INPIT
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subjects CHAMBERS PROVIDED WITH MANIPULATION DEVICES
CONVEYING
HAND TOOLS
HANDLING THIN OR FILAMENTARY MATERIAL
MANIPULATORS
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
PORTABLE POWER-DRIVEN TOOLS
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
title SUBSTRATE SUCTION UNIT AND SUBSTRATE SUCTION ASSEMBLY
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