SUBSTRATE SUCTION UNIT AND SUBSTRATE SUCTION ASSEMBLY

PROBLEM TO BE SOLVED: To provide a substrate suction unit and a substrate suction assembly for sucking a plurality of substrates. SOLUTION: In the substrate suction unit and the substrate suction assembly for sucking a plurality of substrates, the substrate suction assembly includes a fixed frame an...

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Bibliographische Detailangaben
Hauptverfasser:	TSENG SHIH MING, SUN LIHSHIUAN, CHEN JUIHSI
Format:	Patent
Sprache:	eng
Schlagworte:	CHAMBERS PROVIDED WITH MANIPULATION DEVICES CONVEYING HAND TOOLS HANDLING THIN OR FILAMENTARY MATERIAL MANIPULATORS PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS PORTABLE POWER-DRIVEN TOOLS SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a substrate suction unit and a substrate suction assembly for sucking a plurality of substrates. SOLUTION: In the substrate suction unit and the substrate suction assembly for sucking a plurality of substrates, the substrate suction assembly includes a fixed frame and a plurality of substrate suction units. Each substrate suction unit is fixed on the fixed frame corresponding to each substrate with a spacing therebetween. Each substrate suction unit is pneumatically connected to a vacuum apparatus, and includes a body and suction units. The body is pneumatically connected to the vacuum apparatus, the suction units are symmetrically provided on terminals of the body, and pneumatically connected to the vacuum apparatus via the body, and has a plurality of suction members to be used for uniformly sucking any one of the substrates. COPYRIGHT: (C)2011,JPO&INPIT