LIQUID IMPREGNATING APPARATUS AND LIQUID IMPREGNATION METHOD FOR ISUBSTRATE

PROBLEM TO BE SOLVED: To provide a liquid impregnating apparatus in which liquid can efficiently be impregnated into a substrate with a small liquid amount, and to provide a liquid impregnation method for the substrate. SOLUTION: The liquid impregnating apparatus includes: a columnar roll 2 for pressure-transporting the substrate 20; and a bolster 4 which has a circular arcuate cross section along the outer periphery of the roll 2 and which has a liquid 30 storing recessed part 3 oppositely arranged on the outer periphery of the roll 2. The substrate 20 supplied between the roll 2 and the recessed part 3 of the bolster 4 is pressed therebetween in the liquid 30 stored in the recessed part 3 of the bolster 4 and is compressed in the thickness direction. The impregnation of the liquid 30 into the substrate 20 is performed by the recovery from compression of the substrate 20 through the release of the pressurization accompanying to the passage between the roll 2 and the recessed part 3 of the bolster 4. COPYRIGHT: (C)2011,JPO&INPIT