THIN FILM COATING APPARATUS AND DOUBLE-SIDED THIN FILM COATING APPARATUS

PROBLEM TO BE SOLVED: To provide an innovative thin film coating apparatus capable of carrying out double-sided coating for continuously, precisely, and speedily forming a thin film before drying, decreasing scratches of a metal film (an object body to be coated 5) to be a substrate and also defects due to generation and contamination of an abrasion powder of the tip end contact part of a nozzle part particularly in production of a lithium ion battery formation material, and accordingly producing a lithium ion battery formation material by this double-sided coating to be carried out speedily and a double-sided thin film coating apparatus. SOLUTION: The thin film coating apparatus includes a pre-coating part 6 upstream of transportation of an object to be coated 5 to a tip end discharge hole 3 of a nozzle part 4 and applies a coating liquid 2 from the tip end discharge hole 3 to the object to be coated 5 which is previously coated by the pre-coating part 6, so that a tip end contact part 7 of the nozzle part 4 with the object to be coated 5 is kept from direct sliding on and contact with the object to be coated 5 and is thus made to slide on and contact with the previously formed coating surface. COPYRIGHT: (C)2011,JPO&INPIT