SUBSTRATE-HOUSING CONTAINER
PROBLEM TO BE SOLVED: To provide a substrate-housing container wherein all of a plurality of hooking bodies do not retract into a lid body, even if a strong impact, or the like, acts thereon, and discouraging the lid body from coming off a container body, casting aside the possibility of contaminati...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a substrate-housing container wherein all of a plurality of hooking bodies do not retract into a lid body, even if a strong impact, or the like, acts thereon, and discouraging the lid body from coming off a container body, casting aside the possibility of contamination or damages to a substrate. SOLUTION: The substrate-housing container includes a lid body 10, which engages with a front side opened on the container body that houses a semiconductor wafer, and a locking mechanism 30, which is built in the lid body 10 to lock the lid body 10 engaged with the front side of the container body. The locking mechanism 30 includes a rotating plate 31, which is rotated from outside the lid body 10; a pair of connection bars 36 which is swung by rotation of the rotating plate 31; a pair of hooking members 37, which protrude from the peripheral wall of the lid body 10 under swinging of the connection bars 36 are engaged with the inner periphery on the front side of the container body; and a link mechanism 34; which connects the rotating plate 31 with the connection bar 36. When the lid body 10 is locked, the pair of connection bars 36 are extended vertically, straight toward the hooking member 37; and when the lid body 10 is unlocked, the connection bars 36 are tilted in directions which respectively differ with respect to the hooking member 37. COPYRIGHT: (C)2011,JPO&INPIT |
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