DIAGNOSIS METHOD OF SEMICONDUCTOR WAFER CONVEYING DEVICE

PROBLEM TO BE SOLVED: To improve a device operating rate by detecting a sign of failure during normal operation and optimizing a checkout time without adding a new hardware on a wafer conveying device, especially on an arm part having high risk of failure. SOLUTION: The semiconductor wafer conveying device includes: a robot, which is provided with an arm part having a link mechanism including a belt and pulley and converting rotational movement of a motor into linear movement, and a hand part for holding a wafer, and which conveys the wafer; a motor control part provided with a rotating position detection part for detecting a rotating position of the motor; and a hand part position detection part for detecting passing of the hand part. In the diagnosis method of the semiconductor wafer conveying device, the rotating position when the hand part is detected by the hand part position detection part is recorded and deterioration of the belt is detected based on an amount of change of the rotating position. COPYRIGHT: (C)2011,JPO&INPIT