TEMPERATURE CONTROL DEVICE AND TEMPERATURE CONTROL METHOD

PROBLEM TO BE SOLVED: To avoid the generation of integration wind-up even if the rated range of a power regulator and that of a heater do not match each other. SOLUTION: A temperature control device includes an AT operation amount upper limit value storing part 4 for determining an operation amount upper limit value OH_AT in executing limit cycle automatic tuning (AT) which sets PID parameters by generating a limit cycle for outputting a manipulated variable MV to the power regulator for supplying power to the heater, an AT operation executing part 5 for executing the AT, an amplitude detection part 6 for detecting the amplitude of a temperature in executing the AT, an amplitude ratio calculating part 8 for calculating an amplitude ratio, a ratio determining part 9 for determining a saturation estimating value of the manipulated variable MV whose heater output is saturated based on a relationship between the ratio and a predetermined value, and an operating amount upper limit value setting part 10 for setting the saturation estimating value of the manipulated variable MV as an operating amount upper limit value OH or an integration upper limit value IH that is used by a PID calculating part 2 at normal control operation. COPYRIGHT: (C)2011,JPO&INPIT