VACUUM PROCESSOR AND GRAPH LINE DISPLAY METHOD

PROBLEM TO BE SOLVED: To compare a plurality of graphs in an overlapped manner. SOLUTION: On a screen 100, when graph lines 132 of a plurality of measurement values of vacuum processing have different peaks, first and second measure lines 101 and 102 are aligned with the peak of the other graph line...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	SARUWATARI JIRO, HIRAKI TSUTOMU, YAMANE KATSUMI
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING DIFFUSION TREATMENT OF METALLIC MATERIAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To compare a plurality of graphs in an overlapped manner. SOLUTION: On a screen 100, when graph lines 132 of a plurality of measurement values of vacuum processing have different peaks, first and second measure lines 101 and 102 are aligned with the peak of the other graph line 132, first and second time on an X axis where the first and the second measure lines 101 and 102 are located are displayed, the graph line 132 is selected and moved, the peak positions are aligned with each other, and the measurement values are compared. Thus, it is possible to correct the disturbance at a graph start point using noise, to achieve accurate comparison. It is possible to move the graph 132 while viewing a control signal or the shape of the graph line 132, thereby facilitating correction. COPYRIGHT: (C)2011,JPO&INPIT