DEGASSING VESSEL AND COATING APPARATUS

PROBLEM TO BE SOLVED: To provide a degassing vessel quickly separating and removing bubbles and micro bubbles in a liquid feed pipe mixed into liquid such as resist or pigment dispersion liquid, and increasing the stability of product quality and productivity. SOLUTION: The degassing vessel 1 for de...

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Bibliographische Detailangaben
Hauptverfasser:	FURUKAWA TADASHI, IGARASHI AKIHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a degassing vessel quickly separating and removing bubbles and micro bubbles in a liquid feed pipe mixed into liquid such as resist or pigment dispersion liquid, and increasing the stability of product quality and productivity. SOLUTION: The degassing vessel 1 for degassing liquid includes a casing 3, a cylindrical body 5 raised from a bottom of the casing 3 inside the casing 3, a cylindrical body 7 raised from the bottom higher than the cylindrical body 5 in a plane inside the cylindrical body 5 inside the casing 3, a flow passage like a line 25 making the part between the cylindrical bodies 5 and 7 communicate with the inside of the cylindrical body 7 at a position lower than the height of the cylindrical body 5, and rotary blades 11 substantially horizontally rotating around a shaft 17. COPYRIGHT: (C)2011,JPO&INPIT