ANALYZING DEVICE

PROBLEM TO BE SOLVED: To provide an analyzing device capable of calculating with high accuracy heat of linkage by recombination of radicals. SOLUTION: The analyzing device is provided with a radical generating part equipped with a generating chamber with a first opening and a plasma generating means for generating radicals by generating plasma of raw material gas at the generating chamber, a measuring part equipped with a measuring tube with a second opening communicated with the first and a temperature sensor housed in the measuring tube for detecting the radicals flowing into the measuring tube, and a shielding part located on a line connecting the first opening and the second opening for shielding radiation from the plasma to a thermocouple. The radicals generated at the radical generating part flow from the first opening of the generating chamber into the second opening of the measuring tube and reach the temperature sensor. Heat of linkage of the radicals is calculated from an output of the temperature sensor. Here, radiation from the plasma is shielded by the shielding part, and radiation heat is prevented from being impressed on the temperature sensor, so that improvement of accuracy of heat of linkage is made possible. COPYRIGHT: (C)2011,JPO&INPIT