SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM

PROBLEM TO BE SOLVED: To provide a substrate processing apparatus or the like, capable of processing in parallel a substrate which is to be processing-started prior to other substrates and a substrate which is processed in a regular schedule. SOLUTION: A processing block 14a (14b) performs the same...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YOSHIDA MASAHIRO, TAKUMA YASUSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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