SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM

PROBLEM TO BE SOLVED: To provide a substrate processing apparatus or the like, capable of processing in parallel a substrate which is to be processing-started prior to other substrates and a substrate which is processed in a regular schedule. SOLUTION: A processing block 14a (14b) performs the same type of processing on substrates W carried in from a substrate carry-in block 11 in a plurality of processing units 2 by using substrate transfer parts 141a and 141b. When a priority substrate WP having a priority over other substrates W is carried, a control unit 5 carries and processes the priority substrate WP in a priority processing unit 2P that can receive a next substrate W among priority processing units 2P to which a plurality of processing units 2 are partially or wholly assigned, in preference to the other substrates W. COPYRIGHT: (C)2011,JPO&INPIT