LASER IRRADIATION SYSTEM AND LASER IRRADIATION METHOD

PROBLEM TO BE SOLVED: To provide a laser irradiation system which prevents the equipment from being damaged due to reflected laser beams, and to provide a laser irradiation method using the system. SOLUTION: The invention relates to a laser irradiation system 100 and a laser irradiation method. The laser irradiation system in embodiments includes: a laser beam generator 33 to generate laser beams; a laser beam irradiation portion 31 to receive and radiate the laser beams onto a target 10; a laser beam sensor 32 to sense the laser beam reflected back toward the laser beam irradiation portion among the laser beams emitted from the laser beam irradiation portion; a detector 34 to convert the laser beam sensed by the laser beam sensor into electrical signal data; and a controller 35 to control the output of the laser beam generator based on the signal data provided by the detector. COPYRIGHT: (C)2011,JPO&INPIT