METHOD OF CREATING SHOT MAP

PROBLEM TO BE SOLVED: To form a shot map in a manner to optimize a benefit of a semiconductor chip. SOLUTION: A product production control system 70 includes an integrated control section 1, a yield information section 2, a product information section 3, a CAD layout server 4, a simulation server 5, and a user terminal 6. The product production control system 70 controls the production of products such as semiconductor chips or the like including semiconductor integrated circuits or semiconductor devices. Furthermore, it prepares a shot map in a manner to optimize the benefit of a semiconductor chip by using a yield model that is created based on the yield information. COPYRIGHT: (C)2011,JPO&INPIT