METHOD FOR INSPECTING SURFACE OF METAL PATTERN FORMED RESIN SUBSTRATE, AND METHOD FOR MANUFACTURING THE METAL PATTERN FORMED RESIN SUBSTRATE

PROBLEM TO BE SOLVED: To provide a method for inspecting the surface of the metal pattern formed resin substrate capable of observing the resin surface between metal patterns and the surfaces of the metal patterns at the same time and capable of precisely sorting out a defective product, and a method for manufacturing the metal pattern formed resin substrate. SOLUTION: The metal pattern formed resin substrate 1 is irradiated with exciting light a1 and visible light a2 at the same time to get the light emitted from the resin surface 2 of the metal pattern formed resin substrate 1 and the visible light reflected by the metal patterns 3 detected by a detection system having no sensitivity to the exciting light but having sensitivity to fluorescence, phosphorescence or visible light. The intensity of the visible light a2 allowed to irradiate the metal pattern formed resin substrate 1 is preferably set to 0.0001-1% of the intensity of the exciting light a1 allowed to irradiate the metal pattern formed resin substrate 1. Then, the surfaces of the resin and metal of the metal pattern formed resin substrate is thus inspected and the defective product is removed to manufacture the metal pattern formed resin substrate. COPYRIGHT: (C)2011,JPO&INPIT