POWER GENERATION APPARATUS

PROBLEM TO BE SOLVED: To provide a generator which converts vibrating energy into electrical energy, especially, a compact and large output vibration drive type of capacitive generator which is manufactured using a MEMS technique. SOLUTION: The generator has a dielectric G1, a movable part G4 which faces the dielectric with a specified distance from the dielectric G1, an electret G6 and a counter electrode G5, which generate a fringe fields to pierce the dielectric G1 between two electrodes, while being formed under the movable part G4. The generator outputs a charge introduced into the counter electrode G5 as a current, when the volume share of the dielectric G1 between the electret G6 and the counter electrode G5 changes according to the horizontal displacement of the movable member G4. The generator has a metal layer G2, which is formed on the surface of the dielectric G1 to prevent the fringe field from penetrating the dielectric G1 and a fluororesin layer G3, which is formed to cover the dielectric G1 and the metal layer G2 and have flat surfaces with respect to the movable member G4. COPYRIGHT: (C)2011,JPO&INPIT