BACK CONTACT SOLAR CELL ELEMENT, AND METHOD OF MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To provide a back contact solar cell element capable of reducing contact resistance while suppressing recombination loss of carriers, and to provide a method of manufacturing the same. SOLUTION: This back contact solar cell element includes a silicon substrate 101 containing first conductivity type impurities at a first concentration, and first electrodes 110 and second electrodes 111 formed on a light non-reception surface 102b on the side opposite to a light reception surface 102a of the silicon substrate 101. In the solar cell element, the silicon substrate 101 includes, in a predetermined region of a surface layer part of the light non-reception surface 102b, a first conductivity type impurity region 104 containing the first conductivity type impurities at a second concentration higher than the first concentration, and a second conductivity type impurity region 105 containing second conductivity type impurities; the first electrode 110 is connected to the first conductivity type impurity region 104; the second electrode 111 is connected to the second conductivity type impurity region 105; a first silicide layer 108 is formed in a contact part between the first electrode 110 and the first conductivity type impurity region 104; and a second silicide layer 109 is formed in a contact part between the second electrode 111 and the second conductivity type impurity region 105. COPYRIGHT: (C)2011,JPO&INPIT