ELECTRODE FILM AND GLASS SUBSTRATE HAVING THE SAME, AND METHOD OF MANUFACTURING THE GLASS SUBSTRATE
PROBLEM TO BE SOLVED: To prevent an Mo electrode film from readily peeling off, and to prevent adverse effects to diffusion of Na from a glass substrate, when forming the Mo electrode film on the glass substrate. SOLUTION: After forming a film including an Mo nitride on the glass substrate 1 as a re...
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| creator | ANDO AKIRO SAKAMOTO HIROAKI |
| description | PROBLEM TO BE SOLVED: To prevent an Mo electrode film from readily peeling off, and to prevent adverse effects to diffusion of Na from a glass substrate, when forming the Mo electrode film on the glass substrate. SOLUTION: After forming a film including an Mo nitride on the glass substrate 1 as a relaxed layer 2 by a PVD method under an atmosphere that contains nitrogen gas, an Mo film is formed as the Mo electrode film 3 by the PVD method under an Ar gas atmosphere, thus reducing internal stresses of a film and preventing ready peeling. Also, inclusion of Mo in the relaxed layer 2 enables diffusion of Na from the glass substrate 1. COPYRIGHT: (C)2011,JPO&INPIT |
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SOLUTION: After forming a film including an Mo nitride on the glass substrate 1 as a relaxed layer 2 by a PVD method under an atmosphere that contains nitrogen gas, an Mo film is formed as the Mo electrode film 3 by the PVD method under an Ar gas atmosphere, thus reducing internal stresses of a film and preventing ready peeling. Also, inclusion of Mo in the relaxed layer 2 enables diffusion of Na from the glass substrate 1. 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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | ELECTRODE FILM AND GLASS SUBSTRATE HAVING THE SAME, AND METHOD OF MANUFACTURING THE GLASS SUBSTRATE |
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