ELECTRODE FILM AND GLASS SUBSTRATE HAVING THE SAME, AND METHOD OF MANUFACTURING THE GLASS SUBSTRATE

PROBLEM TO BE SOLVED: To prevent an Mo electrode film from readily peeling off, and to prevent adverse effects to diffusion of Na from a glass substrate, when forming the Mo electrode film on the glass substrate. SOLUTION: After forming a film including an Mo nitride on the glass substrate 1 as a relaxed layer 2 by a PVD method under an atmosphere that contains nitrogen gas, an Mo film is formed as the Mo electrode film 3 by the PVD method under an Ar gas atmosphere, thus reducing internal stresses of a film and preventing ready peeling. Also, inclusion of Mo in the relaxed layer 2 enables diffusion of Na from the glass substrate 1. COPYRIGHT: (C)2011,JPO&INPIT