GENERATING METHOD, CREATING METHOD, EXPOSURE METHOD, AND PROGRAM

PROBLEM TO BE SOLVED: To provide a technique advantageous to generate data on patterns of a plurality of originals that are used in multiple exposure. SOLUTION: There is provided a generation method for generating by a computer, data of patterns of a plurality of originals for use in multiple exposu...

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Bibliographische Detailangaben
1. Verfasser: KAWASHIMA MIYOKO
Format: Patent
Sprache:eng
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