MEMS MEASURING DEVICE

PROBLEM TO BE SOLVED: To provide an MEMS measuring device that measures vibration conditions in the same way at the specified timing at a number of MEMS measuring points and surely find out features of a vibration in each part of the MEMS by applying laser beams to a number of points of the vibrated MEMS at the same time. SOLUTION: A number of laser beams with different frequencies are applied to a number of points of vibrating MEMS 80 at the same time, and reflection beams from each of irradiated points of the MEMS 80 are detected as an interference beam by an optical detection unit 50. Information picked up from the obtained detection signal is used to find out vibration conditions at each of applied positions of the MEMS 80, and therefore vibration conditions can be detected at the plurality of points of the MEMS at the same timing. A variance of vibration at each unit of the MEMS 80 at the specified timing is measured, and features of vibration that appears depending on the structure of the MEMS 80 can surely be understood. COPYRIGHT: (C)2011,JPO&INPIT