APPARATUS AND METHOD OF MEASURING MOBILITY, AS WELL AS APPARATUS AND METHOD OF MEASURING RESISTIVITY

PROBLEM TO BE SOLVED: To nondestructively calculate mobility of carriers in a semiconductor and electric resistivity of the semiconductor in a short time. SOLUTION: An apparatus of measuring mobility includes: a memory 101 for storing a relationship between the mobility μ of carriers in the semiconductor and an attenuation coefficient γ of the carriers, and a relationship between the reflectivity R of the semiconductor for terahertz light and the attenuation coefficient γ of the carriers, respectively; a light irradiation unit 103 for shedding the terahertz light 105 to the semiconductor serving as a sample; a detection unit 109 for detecting reflective light 108 of the sample against the irradiated terahertz light 105; a reflectance calculation unit 111 for calculating a reflectance Rexpof the sample by obtaining a ratio of intensity of the reflective light 108 to an intensity of the irradiated terahertz light 105; an acquisition unit 113 for referring to the relationship between the stored reflectance R and the attenuation coefficient γ of the carriers to acquire an attenuation coefficient γexpof the sample corresponding to the reflectance Rexpof the sample; and a mobility calculation unit for calculating a mobility μexpof the sample from the relationship between the stored mobility μ and the attenuation coefficient γexpbased on the acquired attenuation coefficient γexp. COPYRIGHT: (C)2011,JPO&INPIT