SURFACE INSPECTION DEVICE AND METHOD

PROBLEM TO BE SOLVED: To provide a surface inspection device and method that perform high-speed image processing, and perform accurate surface inspection with a simple constitution without being affected by dirt near an edge or a shape failure. SOLUTION: The surface inspection device includes a ligh...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KAZAMA AKIRA, OSHIGE TAKAHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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