SURFACE INSPECTION DEVICE AND METHOD

PROBLEM TO BE SOLVED: To provide a surface inspection device and method that perform high-speed image processing, and perform accurate surface inspection with a simple constitution without being affected by dirt near an edge or a shape failure. SOLUTION: The surface inspection device includes a ligh...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	KAZAMA AKIRA, OSHIGE TAKAHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a surface inspection device and method that perform high-speed image processing, and perform accurate surface inspection with a simple constitution without being affected by dirt near an edge or a shape failure. SOLUTION: The surface inspection device includes a light source for irradiating a surface to be inspected with light, a plurality of cameras that receive and image reflected light from the surface to be inspected and are arranged in the width direction of the surface to be inspected so that visual fields overlap each other, a plurality of image processing apparatus for processing imaging signals from the cameras one to one, and a computer for processing flaw information from the image processing apparatus. The surface inspection device detects a surface flaw existing in the surface to be inspected. Each image processing apparatus includes an edge detection processing means and an edge processing means for independently performing the same processing. COPYRIGHT: (C)2011,JPO&INPIT