CHARGE DISTRIBUTION IMAGING DEVICE

PROBLEM TO BE SOLVED: To provide a charge distribution imaging device having high sensitivity, as well as, high spatial resolution. SOLUTION: In the charge distribution imaging device, a single electron transistor or a quantum point-contact element is adopted in an electrometer 73, and a detection head to which a conductive fine probe 72 is electrically bonded is used for its gate electrode 74. A sample 76 is scanned, while controlling so that the interval between a sample surface and the tip of the conductive fine probe is kept constant by a signal from a tuning fork 71, and the output from the electrometer 73 is made into an image and displayed on a display part 79. COPYRIGHT: (C)2011,JPO&INPIT