SPECTRAL PURITY FILTER FOR USE IN LITHOGRAPHIC DEVICE

PROBLEM TO BE SOLVED: To provide an improved or alternative spectral purity filter, or a spectral purity filter arrangement. SOLUTION: This spectral purity filter includes a plurality of apertures extending in a member. The apertures are structured to suppress radiation of a first wavelength and all...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SOER WOUTER ANTHON, BANINE VADIM YEVGENYEVICH, JAK MARTIN JACOBUS JOHAN, WILHELMUS VAN HERPEN MAARTEN MARINUS JOHANNES, YAKUNIN ANDREY MIKHAILOVICH
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GAMMA RAY OR X-RAY MICROSCOPES IRRADIATION DEVICES NUCLEAR ENGINEERING NUCLEAR PHYSICS PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
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