SPECTRAL PURITY FILTER FOR USE IN LITHOGRAPHIC APPARATUS

PROBLEM TO BE SOLVED: To provide an improved or alternative spectral purity filter. SOLUTION: The spectral purity filter includes a plurality of apertures penetrating a member. The aperture is formed to suppress radiation having a first wavelength, and transmit at least a part of radiation having a...

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Hauptverfasser:	SOER WOUTER ANTHON, BANINE VADIM YEVGENYEVICH, JAK MARTIN JACOBUS JOHAN, WILHELMUS VAN HERPEN MAARTEN MARINUS JOHANNES, YAKUNIN ANDREY MIKHAILOVICH
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an improved or alternative spectral purity filter. SOLUTION: The spectral purity filter includes a plurality of apertures penetrating a member. The aperture is formed to suppress radiation having a first wavelength, and transmit at least a part of radiation having a second wavelength. The second wavelength of the radiation is shorter than the first wavelength of the radiation. A first region of the spectral purity filter has a first structure that provides a first radiation transmission profile to the radiation, having the first wavelength and the radiation having the second wavelength, and a second region of the spectral purity filter has a second different structure to provide a second different radiation transmission profile to the radiation, having the first wavelength and the radiation having the second wavelength. COPYRIGHT: (C)2011,JPO&INPIT