SELFSCANNING TYPE LIGHT EMITTING ELEMENT ARRAY AND MANUFACTURING METHOD THEREOF
PROBLEM TO BE SOLVED: To provide a selfscanning type light emitting element array, in which the characteristic of Schottky barrier diode that connects between gates of a light emitting thyristor is excellent. SOLUTION: The selfscanning type light emitting array 1 includes a plurality of light emitti...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a selfscanning type light emitting element array, in which the characteristic of Schottky barrier diode that connects between gates of a light emitting thyristor is excellent. SOLUTION: The selfscanning type light emitting array 1 includes a plurality of light emitting thyristors S arrayed in one dimension, and an interlayer insulating film 10 formed on the plurality of light emitting thyristors S. It also includes a metal wiring 20 which is formed on the interlayer insulating film 10 and forms Schottky connection to wet-etched part of a gate layer 33 of the light emitting thyristor S through a wiring connection hole 11 formed in the interlayer insulating film 10, to constitute Schottky barrier diode SB that connects between gates of the light emitting thyristors S which adjoin each other among the plurality of light emitting thyristors S. COPYRIGHT: (C)2011,JPO&INPIT |
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