ZINC OXIDE BASED SINTERED COMPACT TARGET

PROBLEM TO BE SOLVED: To provide a new zinc oxide based sintered compact target without using boron oxide (B2O3) powder. SOLUTION: In the zinc oxide-type sintered compact target, zinc oxide (ZnO) powder and boron nitride (BN) powder are sintered. Preferably, the amount of nitrogen (N) of the sintere...

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Bibliographische Detailangaben
1. Verfasser:	KUBOI TAKESHI
Format:	Patent
Sprache:	eng
Schlagworte:	ARTIFICIAL STONE CEMENTS CERAMICS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIME, MAGNESIA METALLURGY REFRACTORIES SLAG SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF NATURAL STONE
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Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a new zinc oxide based sintered compact target without using boron oxide (B2O3) powder. SOLUTION: In the zinc oxide-type sintered compact target, zinc oxide (ZnO) powder and boron nitride (BN) powder are sintered. Preferably, the amount of nitrogen (N) of the sintered compact is set to be ≤0.01 mass%, and more preferably, ≤0.005 mass%. Further, the amount of boron (B) in the sintered compact is preferably 0.05-1 mass%. The target can be obtained by mixing, for example, zinc oxide powder with boron nitride powder, and sintering the mixture in the nitrogen atmosphere in the temperature range of 1,000-1,200°C. COPYRIGHT: (C)2011,JPO&INPIT