SUBSTRATE PROCESSING APPARATUS, SUBSTRATE STORAGE POD OPENING AND CLOSING DEVICE, METHOD FOR PROCESSING SUBSTRATE, METHOD FOR CONVEYING SUBSTRATE, AND METHOD FOR OPENING AND CLOSING SUBSTRATE STORAGE POD

PROBLEM TO BE SOLVED: To enhance throughput by shortening a lead time. SOLUTION: The substrate processing apparatus includes: a plurality of substrate loading ports set in a vertical direction, each of the substrate loading ports being adapted to take a substrate in and out of a substrate pot contai...

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Hauptverfasser:	YANAGAWA HIDEHIRO, MATSUNAGA TATSUHISA, NAKAJIMA TAKAYOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONVEYING DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HANDLING THIN OR FILAMENTARY MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Zusammenfassung:	PROBLEM TO BE SOLVED: To enhance throughput by shortening a lead time. SOLUTION: The substrate processing apparatus includes: a plurality of substrate loading ports set in a vertical direction, each of the substrate loading ports being adapted to take a substrate in and out of a substrate pot containing a plurality of substrates and having a cap to be freely opened and closed; and an opening and closing unit 20 provided on each of the substrate loading ports which individually move the cap in a horizontal direction while holding the cap by a closure 40 when the cap of the substrate pod mounted on the substrate loading port is opened and closed, the closure 40 for holding the cap of the substrate pod mounted on the plurality of substrate loading ports being provided respectively. COPYRIGHT: (C)2011,JPO&INPIT