METHOD FOR PRODUCING B-ALKYLBORAZINE

METHOD FOR PRODUCING B-ALKYLBORAZINE

PROBLEM TO BE SOLVED: To provide a method for selectively synthesizing a B-alkylborazine, to which different substituents are introduced on a boron (B) atom, to be used for forming an interlayer insulation film of a semiconductor, a barrier metal layer, or an etch stopper layer. SOLUTION: A borazine...

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Bibliographische Detailangaben
1. Verfasser: OKAJIMA MASAYUKI
Format: Patent
Sprache:eng
Schlagworte:
ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM
APPARATUS THEREFOR
CHEMISTRY
GENERAL METHODS OF ORGANIC CHEMISTRY
METALLURGY
ORGANIC CHEMISTRY
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a method for selectively synthesizing a B-alkylborazine, to which different substituents are introduced on a boron (B) atom, to be used for forming an interlayer insulation film of a semiconductor, a barrier metal layer, or an etch stopper layer. SOLUTION: A borazine compound represented by chemical formula 1 and an alkene compound are reacted under existence of a catalyst to synthesize a B-alkylborazine. Thus, the B-alkylborazine in which the H-B bonds are converted to alkyl-B bonds is synthesized. In the formula, R1s each independently represents a hydrogen atom or an organic group and R2represents an organic group having two or more carbons. COPYRIGHT: (C)2011,JPO&INPIT