INSPECTION METHOD OF PROBE CARD, INSPECTION METHOD OF SEMICONDUCTOR DEVICE AND PROBE CARD

PROBLEM TO BE SOLVED: To provide an inspection method of a probe card, which enables a user to correctly know a replacement time of the probe card, based on a result of a conduction test in the probe card. SOLUTION: The inspection method of the probe card attached to a semiconductor inspection appar...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	MATSUKI HIROSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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