LARGE-SIZED PRECISION SUBSTRATE STORAGE CONTAINER

PROBLEM TO BE SOLVED: To prevent deformation and breakage of a large-sized precision substrate by reducing stress applied to the large-sized precision substrate in a large-sized precision substrate storage container. SOLUTION: The large-sized precision substrate storage container includes: a tray 20...

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Bibliographische Detailangaben
1. Verfasser: YAJIMA TOSHITSUGU
Format: Patent
Sprache:eng
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