LARGE-SIZED PRECISION SUBSTRATE STORAGE CONTAINER

PROBLEM TO BE SOLVED: To prevent deformation and breakage of a large-sized precision substrate by reducing stress applied to the large-sized precision substrate in a large-sized precision substrate storage container. SOLUTION: The large-sized precision substrate storage container includes: a tray 20...

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1. Verfasser: YAJIMA TOSHITSUGU
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To prevent deformation and breakage of a large-sized precision substrate by reducing stress applied to the large-sized precision substrate in a large-sized precision substrate storage container. SOLUTION: The large-sized precision substrate storage container includes: a tray 20 and a cover 10 which store the large-sized precision substrate and cover the whole and are engaged, wherein the large-sized precision substrate storage container includes fixing tools 40, 60, which are contact with the peripheral edges of both surfaces of the large-sized precision substrate and fix the substrate on each side of the large-sized precision substrate, and buffer plates 50, 70, which are arranged between the fixing tools 40, 60 and at least either one of the tray 20 and the cover 10 and have higher elasticity than the fixing tools 40, 60. COPYRIGHT: (C)2011,JPO&INPIT