TOOL AND MANUFACTURING METHOD THEREOF
PROBLEM TO BE SOLVED: To provide a tool in which a polymer membrane is adhered more tightly on the surface of a base material, and its manufacturing method. SOLUTION: The present method for manufacturing the tool 10, equipped with a base material 11 and a polymer membrane 13 provided on the base mat...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a tool in which a polymer membrane is adhered more tightly on the surface of a base material, and its manufacturing method. SOLUTION: The present method for manufacturing the tool 10, equipped with a base material 11 and a polymer membrane 13 provided on the base material 11 through a silicon dioxide membrane 12, comprises a step A of forming the silicon dioxide membrane 12 on one side 11a of the base material 11 by a physical vapor deposition method; and a step B of forming the polymer membrane 13 on the silicon dioxide membrane 12 by a vapor deposition polymerization method. COPYRIGHT: (C)2011,JPO&INPIT |
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