SUBSTRATE CONVEYING DEVICE
PROBLEM TO BE SOLVED: To suppress the sudden voltage rise of a substrate being carried out of a flotation stage in a substrate conveying device which achieves conveyance of the substrate in a horizontal posture. SOLUTION: A flotation conveyance portion 2A includes the flotation stage 3 which jets ai...
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| creator | WAKAMOTO YUKIHIRO OTSUKA YOSHITAKA MIYASAKI FUMIHIRO NAKAMITSU TAKASHI |
| description | PROBLEM TO BE SOLVED: To suppress the sudden voltage rise of a substrate being carried out of a flotation stage in a substrate conveying device which achieves conveyance of the substrate in a horizontal posture. SOLUTION: A flotation conveyance portion 2A includes the flotation stage 3 which jets air or jets and sucks air to float the substrate, and a pair of substrate carriers 6 provided respectively movably along guide rails 5 arranged on right and left sides of the flotation stage parallel and holding sides of the substrate, and a roller conveyance portion 2B includes a plurality of roller shafts 16 arranged behind the flotation stage in parallel in a substrate conveyance direction and provided rotatably, a plurality of conveyance rollers 17 provided to the respective roller shafts at every predetermined interval and driven by the roller shafts to rotate, and an electrode portion provided between conveyance rollers in level with a top of the flotation stage, and decreasing in area facing the substrate being conveyed in the substrate conveyance direction. COPYRIGHT: (C)2011,JPO&INPIT |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2011029318A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2011029318A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2011029318A3</originalsourceid><addsrcrecordid>eNrjZJAKDnUKDglyDHFVcPb3C3ON9PRzV3BxDfN0duVhYE1LzClO5YXS3AxKbq4hzh66qQX58anFBYnJqXmpJfFeAUYGhoYGRpbGhhaOxkQpAgCAxSDK</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>SUBSTRATE CONVEYING DEVICE</title><source>esp@cenet</source><creator>WAKAMOTO YUKIHIRO ; OTSUKA YOSHITAKA ; MIYASAKI FUMIHIRO ; NAKAMITSU TAKASHI</creator><creatorcontrib>WAKAMOTO YUKIHIRO ; OTSUKA YOSHITAKA ; MIYASAKI FUMIHIRO ; NAKAMITSU TAKASHI</creatorcontrib><description>PROBLEM TO BE SOLVED: To suppress the sudden voltage rise of a substrate being carried out of a flotation stage in a substrate conveying device which achieves conveyance of the substrate in a horizontal posture. SOLUTION: A flotation conveyance portion 2A includes the flotation stage 3 which jets air or jets and sucks air to float the substrate, and a pair of substrate carriers 6 provided respectively movably along guide rails 5 arranged on right and left sides of the flotation stage parallel and holding sides of the substrate, and a roller conveyance portion 2B includes a plurality of roller shafts 16 arranged behind the flotation stage in parallel in a substrate conveyance direction and provided rotatably, a plurality of conveyance rollers 17 provided to the respective roller shafts at every predetermined interval and driven by the roller shafts to rotate, and an electrode portion provided between conveyance rollers in level with a top of the flotation stage, and decreasing in area facing the substrate being conveyed in the substrate conveyance direction. COPYRIGHT: (C)2011,JPO&INPIT</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; CONVEYING ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; HANDLING THIN OR FILAMENTARY MATERIAL ; PACKING ; PERFORMING OPERATIONS ; PNEUMATIC TUBE CONVEYORS ; SEMICONDUCTOR DEVICES ; SHOP CONVEYOR SYSTEMS ; STORING ; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING ; TRANSPORTING</subject><creationdate>2011</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20110210&DB=EPODOC&CC=JP&NR=2011029318A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20110210&DB=EPODOC&CC=JP&NR=2011029318A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>WAKAMOTO YUKIHIRO</creatorcontrib><creatorcontrib>OTSUKA YOSHITAKA</creatorcontrib><creatorcontrib>MIYASAKI FUMIHIRO</creatorcontrib><creatorcontrib>NAKAMITSU TAKASHI</creatorcontrib><title>SUBSTRATE CONVEYING DEVICE</title><description>PROBLEM TO BE SOLVED: To suppress the sudden voltage rise of a substrate being carried out of a flotation stage in a substrate conveying device which achieves conveyance of the substrate in a horizontal posture. SOLUTION: A flotation conveyance portion 2A includes the flotation stage 3 which jets air or jets and sucks air to float the substrate, and a pair of substrate carriers 6 provided respectively movably along guide rails 5 arranged on right and left sides of the flotation stage parallel and holding sides of the substrate, and a roller conveyance portion 2B includes a plurality of roller shafts 16 arranged behind the flotation stage in parallel in a substrate conveyance direction and provided rotatably, a plurality of conveyance rollers 17 provided to the respective roller shafts at every predetermined interval and driven by the roller shafts to rotate, and an electrode portion provided between conveyance rollers in level with a top of the flotation stage, and decreasing in area facing the substrate being conveyed in the substrate conveyance direction. COPYRIGHT: (C)2011,JPO&INPIT</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CONVEYING</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>HANDLING THIN OR FILAMENTARY MATERIAL</subject><subject>PACKING</subject><subject>PERFORMING OPERATIONS</subject><subject>PNEUMATIC TUBE CONVEYORS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>SHOP CONVEYOR SYSTEMS</subject><subject>STORING</subject><subject>TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2011</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZJAKDnUKDglyDHFVcPb3C3ON9PRzV3BxDfN0duVhYE1LzClO5YXS3AxKbq4hzh66qQX58anFBYnJqXmpJfFeAUYGhoYGRpbGhhaOxkQpAgCAxSDK</recordid><startdate>20110210</startdate><enddate>20110210</enddate><creator>WAKAMOTO YUKIHIRO</creator><creator>OTSUKA YOSHITAKA</creator><creator>MIYASAKI FUMIHIRO</creator><creator>NAKAMITSU TAKASHI</creator><scope>EVB</scope></search><sort><creationdate>20110210</creationdate><title>SUBSTRATE CONVEYING DEVICE</title><author>WAKAMOTO YUKIHIRO ; OTSUKA YOSHITAKA ; MIYASAKI FUMIHIRO ; NAKAMITSU TAKASHI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2011029318A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2011</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CONVEYING</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>HANDLING THIN OR FILAMENTARY MATERIAL</topic><topic>PACKING</topic><topic>PERFORMING OPERATIONS</topic><topic>PNEUMATIC TUBE CONVEYORS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>SHOP CONVEYOR SYSTEMS</topic><topic>STORING</topic><topic>TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>WAKAMOTO YUKIHIRO</creatorcontrib><creatorcontrib>OTSUKA YOSHITAKA</creatorcontrib><creatorcontrib>MIYASAKI FUMIHIRO</creatorcontrib><creatorcontrib>NAKAMITSU TAKASHI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>WAKAMOTO YUKIHIRO</au><au>OTSUKA YOSHITAKA</au><au>MIYASAKI FUMIHIRO</au><au>NAKAMITSU TAKASHI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>SUBSTRATE CONVEYING DEVICE</title><date>2011-02-10</date><risdate>2011</risdate><abstract>PROBLEM TO BE SOLVED: To suppress the sudden voltage rise of a substrate being carried out of a flotation stage in a substrate conveying device which achieves conveyance of the substrate in a horizontal posture. SOLUTION: A flotation conveyance portion 2A includes the flotation stage 3 which jets air or jets and sucks air to float the substrate, and a pair of substrate carriers 6 provided respectively movably along guide rails 5 arranged on right and left sides of the flotation stage parallel and holding sides of the substrate, and a roller conveyance portion 2B includes a plurality of roller shafts 16 arranged behind the flotation stage in parallel in a substrate conveyance direction and provided rotatably, a plurality of conveyance rollers 17 provided to the respective roller shafts at every predetermined interval and driven by the roller shafts to rotate, and an electrode portion provided between conveyance rollers in level with a top of the flotation stage, and decreasing in area facing the substrate being conveyed in the substrate conveyance direction. COPYRIGHT: (C)2011,JPO&INPIT</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng |
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| subjects | BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING |
| title | SUBSTRATE CONVEYING DEVICE |
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