SUBSTRATE CONVEYING DEVICE

PROBLEM TO BE SOLVED: To suppress the sudden voltage rise of a substrate being carried out of a flotation stage in a substrate conveying device which achieves conveyance of the substrate in a horizontal posture. SOLUTION: A flotation conveyance portion 2A includes the flotation stage 3 which jets air or jets and sucks air to float the substrate, and a pair of substrate carriers 6 provided respectively movably along guide rails 5 arranged on right and left sides of the flotation stage parallel and holding sides of the substrate, and a roller conveyance portion 2B includes a plurality of roller shafts 16 arranged behind the flotation stage in parallel in a substrate conveyance direction and provided rotatably, a plurality of conveyance rollers 17 provided to the respective roller shafts at every predetermined interval and driven by the roller shafts to rotate, and an electrode portion provided between conveyance rollers in level with a top of the flotation stage, and decreasing in area facing the substrate being conveyed in the substrate conveyance direction. COPYRIGHT: (C)2011,JPO&INPIT