FABRY-PEROT INTERFEROMETER AND MANUFACTURING METHOD OF THE SAME

PROBLEM TO BE SOLVED: To provide a Fabry-Perot interferometer wherein a spectroscopy band is wider than conventionally, and to provide a manufacturing method for such a Fabry-Perot interferometer. SOLUTION: The Fabry-Perot interferometer includes a first mirror structure and a second mirror structur...

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Bibliographische Detailangaben
Hauptverfasser:	IWAKI TAKAO, WADO HIROYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS RADIATION PYROMETRY TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a Fabry-Perot interferometer wherein a spectroscopy band is wider than conventionally, and to provide a manufacturing method for such a Fabry-Perot interferometer. SOLUTION: The Fabry-Perot interferometer includes a first mirror structure and a second mirror structure placed facing each other with a gap therebetween. At least a first mirror and a first electrode constituting the first mirror structure are electrically insulated from each other, or a second mirror and a second electrode composing the second mirror structure are electrically insulated from each other. In an initial state where voltage is not applied, opposition distance dei, between an electrically connected portion of a first-electrode-inclusive portion and an electrically connected second-electrode-inclusive portion, is larger than a facing distance dmi between the first mirror and the second mirror. COPYRIGHT: (C)2011,JPO&INPIT