SURFACE PROTECTIVE SHEET

PROBLEM TO BE SOLVED: To provide a surface protective sheet that has improved follow-up ability to a protruding electrode, thereby having an excellent adhesion to a wafer, and effectively prevents a wafer from being broken in peeling off the sheet. SOLUTION: The surface protective sheet is used for...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SASAKI TAKATOSHI, KAWASHIMA NORIYOSHI, ASAI FUMITERU
Format: Patent
Sprache:eng
Schlagworte:
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