SURFACE PROTECTIVE SHEET
PROBLEM TO BE SOLVED: To provide a surface protective sheet that has improved follow-up ability to a protruding electrode, thereby having an excellent adhesion to a wafer, and effectively prevents a wafer from being broken in peeling off the sheet. SOLUTION: The surface protective sheet is used for...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a surface protective sheet that has improved follow-up ability to a protruding electrode, thereby having an excellent adhesion to a wafer, and effectively prevents a wafer from being broken in peeling off the sheet. SOLUTION: The surface protective sheet is used for a semiconductor wafer having the protruding electrode of 10 to 150 μm height on its surface, and includes an adhesive layer having a plurality of layers on one side of a base film. The adhesive layer has a 25°C storage modulus of 10 to 100 MPa, and an adhesive strength with respect to a silicon mirror wafer of 1.0 N/20 mm or less in peeling off the surface protective sheet. COPYRIGHT: (C)2011,JPO&INPIT |
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