LITHOGRAPHIC PROJECTION APPARATUS

PROBLEM TO BE SOLVED: To provide a lithography apparatus that reduces or removes insulation collapse and has an electrical connector suitable for low-pressure, high-voltage electric connection.SOLUTION: The lithographic projection apparatus is configured to transfer a pattern onto a substrate. The l...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SIJBEN ANKO JOZEF CORNELUS, JEROEN-FRANK DEKKERS, DAMEN JOHANNES WILHELMUS, VAN GOMPEL PETRUS ALBERTUS JOHANNES FRANCISCA, BRINKHOF EUGENE MARIA, ROZENVELD JOHANNES ALBERT, LANGELER HERMANUS ANTONIUS
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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