MAGNETIC BEARING DEVICE AND VACUUM PUMP WITH THE SAME

PROBLEM TO BE SOLVED: To provide a magnetic bearing device capable of extending the life of a protection bearing while curbing costs and suppressing an increase in abrasion of a contact surface of a rotor than before, and to provide a vacuum pump with the same.SOLUTION: The magnetic bearing device i...

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Bibliographische Detailangaben
1. Verfasser:	MISU KEIJIRO
Format:	Patent
Sprache:	eng
Schlagworte:	BEARINGS BLASTING ELEMENTS OR CRANKSHAFT MECHANISMS ENGINEERING ELEMENTS AND UNITS FLEXIBLE SHAFTS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS ROTARY BODIES OTHER THAN GEARING ELEMENTS SHAFTS THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a magnetic bearing device capable of extending the life of a protection bearing while curbing costs and suppressing an increase in abrasion of a contact surface of a rotor than before, and to provide a vacuum pump with the same.SOLUTION: The magnetic bearing device includes the rotor 10, magnetic bearings (30, 40, 50) arranged around the rotor 10 and supporting the rotor 10 freely rotatably in a non contact manner, protection bearings (21, 22) arranged around the rotor 10 and supporting the rotor 10 when the rotor 10 is not supported by the magnetic bearings (30, 40, 50), and protection members (71, 72) arranged on the inner ring side of the protection bearings (21, 22) opposed to the rotor 10 while having a groove extending in the axial direction of the rotor 10 in the surface opposed to the rotor 10.