EXHAUST GAS PROCESSING UNIT AND EXHAUST GAS PROCESSING METHOD

PROBLEM TO BE SOLVED: To provide an exhaust gas processing method for positively increasing a VOC concentration to carry out a leveling of the VOC concentration and of improving the removal efficiency of a VOC, and to provide an exhaust gas processing unit.SOLUTION: In a substrate processing section...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ONISHI KIYONOBU, NAKANO MITSURU, SHIOBARA HIDESHI, TOMITA HIROSHI, NAKADA RENPEI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES SEPARATION TRANSPORTING
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