EXHAUST GAS PROCESSING UNIT AND EXHAUST GAS PROCESSING METHOD

PROBLEM TO BE SOLVED: To provide an exhaust gas processing method for positively increasing a VOC concentration to carry out a leveling of the VOC concentration and of improving the removal efficiency of a VOC, and to provide an exhaust gas processing unit.SOLUTION: In a substrate processing section...

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Bibliographische Detailangaben
Hauptverfasser:	ONISHI KIYONOBU, NAKANO MITSURU, SHIOBARA HIDESHI, TOMITA HIROSHI, NAKADA RENPEI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES SEPARATION TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an exhaust gas processing method for positively increasing a VOC concentration to carry out a leveling of the VOC concentration and of improving the removal efficiency of a VOC, and to provide an exhaust gas processing unit.SOLUTION: In a substrate processing section, a substrate is processed by volatile organic solvent, and in a circulation section connected with the substrate processing section, a volatile component of the organic solvent ejected from the substrate processing section is made to circulate through the substrate processing section; and a leveling of the concentration thereof is carried out, while the concentration thereof is increased. Next, in a volatile component processing section connected to the circulation section, the volatile component of the organic solvent with the concentration to which a leveling is carried out is captured and removed.