Au-CONTAINING LAYER TREATED WITH CHARGED PARTICLE BEAM

PROBLEM TO BE SOLVED: To provide a system and a method for providing an Au-containing layer onto the surface of a workpiece. SOLUTION: There is provided a method for providing an Au-containing layer onto the surface of a workpiece. This method comprises a step of supplying a deposition fluid having...

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Bibliographische Detailangaben
1. Verfasser:	JOHANNES JACOBUS LAMBERTUS MULDERS
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a system and a method for providing an Au-containing layer onto the surface of a workpiece. SOLUTION: There is provided a method for providing an Au-containing layer onto the surface of a workpiece. This method comprises a step of supplying a deposition fluid having Au(CO)Cl, a step of depositing the fluid on at least part of the surface of the workpiece, and a step of forming the Au-containing layer on the surface of the sample by directing a charged particle beam toward the surface of the workpiece on which at least part of the fluid has been deposited. By using Au(CO)Cl as a precursor for charged particle induced deposition, a gold (Au) layer can be deposited with a very high purity as compared with those attained in methods known in the art. COPYRIGHT: (C)2011,JPO&INPIT