COATING APPARATUS, AND COATING METHOD

PROBLEM TO BE SOLVED: To reduce whirled-up dust while enabling the shortening of production time. SOLUTION: Gantries 2a-2c each different in coating function and a work table 6 on which a glass substrate 17 is placed are provided on a base stand 1 so as to be movable in an X(T) axis direction. First coating operation is performed on the glass substrate 17 by the coating head 8 of the gantry 2a when the work table 6 is present at an A-position, second coating operation is performed on the glass substrate 17 by the coating head 8 of the gantry 2b when the work table 6 is present at a B-position and third coating operation is performed on the glass substrate 17 by the coating head 8 of the gantry 2c when the work table 6 is present at a C-position. The glass substrate 17 subjected to coating treatment is fed to the surface of the work table 6 from a feed conveyor 18a on a feed-in side while keeping the same height on the feed-in side (a) of the glass substrate 17 and the treated glass substrate 17 is fed to the surface of a feed conveyor 18b on a feed-out side from the work table 6 on the feed-out side of the glass substrate 17 while keeping the same height on the feed-out side (b) of the glass substrate 17. COPYRIGHT: (C)2011,JPO&INPIT