FLUORIDE CRYSTAL, VACUUM ULTRAVIOLET LIGHT EMITTING ELEMENT, AND VACUUM ULTRAVIOLET LIGHT EMITTING SCINTILLATOR

PROBLEM TO BE SOLVED: To provide a fluoride crystal which emits high luminance in a vacuum ultraviolet region, a novel vacuum ultraviolet light emitting element comprising the fluoride crystal and favorably usable for photolithography, cleaning of substrates of semiconductors and liquid crystals, st...

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Bibliographische Detailangaben
Hauptverfasser:	YOSHIKAWA AKIRA, KAWAGUCHI NORIAKI, FUKUDA KENTARO, ABE NAOTO, SUYAMA TOSHIHISA, YANAGIDA TAKEYUKI, YOKOTA ARITAME
Format:	Patent
Sprache:	eng
Schlagworte:	ADHESIVES AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM,CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THERARE-EARTH METALS CRYSTAL GROWTH DYES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INORGANIC CHEMISTRY MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE MEASUREMENT OF NUCLEAR OR X-RADIATION MEASURING METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS PAINTS PHYSICS POLISHES PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEMICONDUCTOR DEVICES SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH TESTING UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a fluoride crystal which emits high luminance in a vacuum ultraviolet region, a novel vacuum ultraviolet light emitting element comprising the fluoride crystal and favorably usable for photolithography, cleaning of substrates of semiconductors and liquid crystals, sterilization, next-generation high-capacity optical discs, medical treatment (ophthalmologic treatment, DNA cutting), and the like, and a vacuum ultraviolet light emitting scintillator favorably usable for a small sized radioactive ray detector mounted with a diamond light receiving element or an AlGaN light receiving element having low background noises as a substitute of a conventional photomultiplier tube. SOLUTION: There are provided a fluoride crystal comprising a mixed phase of K3LuF6and KF, and a vacuum ultraviolet emitting element and a vacuum ultraviolet emitting scintillator comprising the fluoride crystal. COPYRIGHT: (C)2011,JPO&INPIT