LEVITATING CARRYING DEVICE AND LEVITATION UNIT

PROBLEM TO BE SOLVED: To sufficiently prevent damage to a large substrate W by avoiding the interference between the end surface of the substrate W in the carrying width direction and a side levitation unit 39B or the like, even if the substrate W has a deformation such as a warpage. SOLUTION: A frame-like nozzle 51 is formed on the upper surface of a levitation unit body 41. A hollow pipe-like levitation unit leg 53 is installed under the levitation unit body 41. The inside of the levitation unit leg 53 is communicated with the inside of a chamber 29. A circular controlling member 61 for controlling the opening area of each of a pair of openings 57 of the levitation unit leg 53 is fit into a mounting hole 59 of the levitation unit body 41 rotatably about the vertical axis. COPYRIGHT: (C)2011,JPO&INPIT