DETECTOR FOR SURFACE-SHAPE MEASURING MACHINE

PROBLEM TO BE SOLVED: To provide a detector for a surface-shape measuring machine, capable of obtaining simultaneously sufficient lateral rigidity and low measuring force, and improving the accuracy. SOLUTION: Pressurized gas is blown out from each blowout hole formed on each facing surface 54, to thereby form a gas film, in each gap between each side face 32 of a movable piece 3 and each facing surface 54 of bearing members 5, arranged opposite to each side face 32. The movable piece 3 is sandwiched between each facing surface 54 of the bearing members 5 through the gas film, and thereby ricketiness of the movable piece 3 between the bearing members 5 can be suppressed, to thereby obtain sufficient lateral rigidity. Furthermore, pressurized gas is blown out from each blowout hole formed on each bearing surface 53 in a gap between each bearing surface 53 and a spindle 31 to form a gas film, and thereby the spindle 31 can be supported in the noncontact state, and frictional resistance can be significantly suppressed, in comparison with the case where the spindle 31 is supported by a rolling bearing. Consequently, measurement force can be reduced significantly, and accuracy can be improved. COPYRIGHT: (C)2011,JPO&INPIT